Coating machine having an adjustable rotation system

ABSTRACT

Coating machine having a vacuum chamber with at least one coating source disposed in the chamber. A plurality of spindle assemblies are mounted in the chamber with each of the spindle assemblies having a rotatable spindle. A substrate holder is carried by each spindle and is adapted to carry a substrate in such a manner that it is adapted to receive coating material from the coating source. Means is provided for rotating the spindle assemblies about the source. Means is also provided for rotating the spindles about their own axes at the same time they are being rotated about the source. Means is provided to permit adjustment of the spacing of the spindle assemblies from the center of rotation about the source. In addition, means is provided to permit adjustment of the angle of the spindle with respect to the coating source to thereby adjust the angle of incidence of the vapor coating stream with respect to the substrates carried by the spindles.

Bergfelt Jan. 7, 1975 COATING MACHINE HAVING AN ADJUSTABLE ROTATIONSYSTEM [76] Inventor: Nils H. Bergielt, 2789 Giffen Ave.,

Santa Rosa, Calif. 95403 [22] Filed: Dec. 14, 1973 [21] Appl. No.:424,659

[52] US. Cl 118/49, 118/53, 269/57 [51] Int. Cl. C23c 13/08 [58] Field01' Search 118/4949.5, 118/53; 117/1071; 269/57 [56] References CitedUNITED STATES PATENTS 2.351.537 6/1944 Osterberg ct al. 118/49 3,023,7273/1962 Theodoseau ct al 1 18/49 X 3,128,205 4/1964 lllsley 118/493,486,237 12/1969 Sawicki 118/49 3,636,917 l/l972 Baker 118/48 X PrimaryExaminer-Morris Kaplan Attorney, Agent, or Firm-Flehr, Hohbach, Test,Albritton & Herbert [57] ABSTRACT Coating machine having a vacuumchamber with at least one coating source disposed in the chamber. Aplurality of spindle assemblies are mounted in the chamber with each ofthe spindle assemblies having a rotatable spindle. A substrate holder iscarried by each spindle and is adapted to carry a substrate in such amanner that it is adapted to receive coating material from the coatingsource. Means is provided for rotating the spindle assemblies about thesource. Means is also provided for rotating the spindles about their ownaxes at the same time they are being rotated about the source. Means isprovided to permit adjustment of the spacing of the spindle assembliesfrom the center of rotation about the source. In addition, means isprovided to permit adjustment of the angle of the spindle with respectto the coating source to thereby adjust the angle of incidence of thevapor coating stream with respect to the substrates carried by thespindles.

14 Claims, 5 Drawing Figures Patented Jan. 7, 1975 3 Sheets-Sheet 1Patented Jan. 7, 1975 3 Sheets-Sheet 2 Patented Jan. 7, 1975 3Sheets-Sheet 5 COATING MACHINE HAVING AN ADJUSTABLE ROTATION SYSTEMBACKGROUND OF THE INVENTION In US. Pat. No. 3,128,205, there is provideda coating machine which has a double rotation system. However, thissystem utilizes a friction drive in which slippage may occur. Inaddition, no means is provided for varying the spacing of the substrateholders from the axis of rotation of the substrate holders about thesource. For this reason, it is often very difficult to obtain maximumutilization of the space within the vacuum chamber. There is, therefore,a need for a coating machine which has new and improved double rotationsystem.

SUMMARY OF THE INVENTION AND OBJECTS provided for rotating the spindlesof the spindle assem blies about their own axes of rotation during thetime that they are being rotated about the source. Means is provided foradjusting the positions of the spindle assemblies radially with respectto the axis of rotation of the spindle assemblies about the source.Means is also provided for adjusting the angles of the spindles withrespect to the coating source.

In general, it is an object of the present invention to provide acoating machine with a double rotation system which is adjustable.

Another object of the invention is to provide a coating machine of theabove character having spindle assemblies in which the positions of thespindle assemblies can be adjusted along a radius with respect to theaxis of rotation of the spindle assemblies about the source.

Another object of the invention is to provide a coating machine of theabove character in which the radial adjustments of the spindleassemblies can be readily carried out.

Another object of the invention is to provide a machine of the abovecharacter in which the spindle assemblies have spindles which arerotated about their own axes and which are adjustable in angle withrespect to the source.

Another object of the invention is to provide a coating machine of theabove character in which a positive drive without danger of slippage isprovided.

Another object of the invention is to provide a coating machine of theabove character in which maximum usage is made of the space above thecoating source for coating substrates.

Another object of the invention is to provide a coating machine of theabove character in which particularly novel driving means is providedfor causing the rotation of the system.

Another object of the invention is to provide a coating machine of theabove character in which various arrangements of spindle assemblies canbe provided.

Additional objects and features of the invention will appear from thefollowing description in which the preferred embodiment is set forth indetail in conjunction with the accompanying drawing.

BRIEF DESCRIPTION OF THE DRAWINGS I FIG. 1 is a cross-sectional view ofa coating machine incorporating the present invention.

FIG. 2 is an enlarged cross-sectional view showing a portion of thedouble rotation system incorporating the present invention.

FIG. 3 is a cross-sectional view taken along the line 3-3 of FIG. 2.

FIG. 4 is a cross-sectional view taken along the line 44 of FIG. 2.

FIG. 5 is a cross-sectional view taken along the line 5-5 of FIG. 2.

DESCRIPTION OF PREFERRED EMBODIMENT The coating machine having anadjustable double rotation system shown in the drawings consists of alarge coating chamber or housing 11 which can be of any desired shapeas, for example, cylindrical, which is'provided with a cylindrical sidewall 12, a planar top wall 13 and a planar bottom wall 14. The top wall13 and the bottom wall 14 are parallel with respect to each other. Abottom plate 16 is secured to the bottom wall 14 by suitable means suchas bolts (not shown). Suitable O-ring sealing means 17 of a conventionaltype is provided for forming a vacuum-tight seal between the bottom wall14 and the bottom base plate 16. It can be seen that the chamber orhousing 12 provides a large enclosed chamber 19 which is adapted to beevacuated by large vacuum pumps (not shown) to provide the desireddegree of vacuum.

Means of a conventional type is provided within the chamber forevaporating coating materials of various types. Thus, there isschematically shown a resistance heated boat 21 and an electron gun 22.By way of example, twelve resistance heated boats 21 can be provided onthe bottom plate 16 and two electron guns 22 spaced in a 12 inch circlecan be carried by the base plate 16. This makes it possible to utilize agreat many different coating materials in the vacuum chamber fordepositing very complicated coatings.

A top plate 26 covers a large opening 27 provided in the top wall 13. Itis secured to the top wall 13 by suitable means such as bolts (notshown). Suitable O-ring v sealing means 28 is provided for establishinga vacuumtight seal between the top plate 26 and the top wall 13. Thecoating chamber thus far described is conventional.

The adjustable double rotation system 31 consists of a large centrallydisposed stem 32 which extends through a hole 33 provided in the topplate 26. The stem 32 is provided with a radially extending flange 34 atits upper end which is secured to the top plate 26 by suitable meanssuch as bolts 36. O-ring sealing means 37 is mounted between the flange34 and the top plate 26. A circular transfer plate 39 is secured to thebottom end of the stem 32 by cap screws 41.

A chip changer assembly 42 for monitoring the vapor stream from thesource is provided. The assembly 42 is secured to the transfer plate 39by cap screws 43. The chip changer assembly 42 is conventional and issomewhat similar to the chip changer assembly described in US. Pat. No.3,387,742. Means is provided for causing operation of the chip changerassembly and consists of a shaft 46 which has its lower extremitysecured to the chip changer assembly 42 and which is coaxially disposedwithin the stem 32. The shaft 46 extends through a vacuum feed-throughprovided with bearings (not shown). This shaft 46 carries a pulley (notshown) which is driven by a belt (also not shown).

A centrally disposed bearing housing 51 is provided in the chamber 19and is rotatably mounted upon the stem 32 by upper and lower ballbearing assemblies 52 and 53. Bearing assembly retaining rings 54 and 56are provided and are secured to opposite ends of the housing 51 by capscrews 57. Upper and lower rings 58 and 59 are securedto the housing 51by cap screws 61. A spoke assembly 62 is secured to the upper and lowerrings 58 and 59 by suitable means such as welding. By way of example,six arms or spokes 63 spaced 60 apart form a part of the spoke assembly62. A large annular plate or mounting ring 64 is secured to the lowerouter extremities of the spokes 63 by bolts 65 extending throughhorizontal flange portions 63a of the spokes 63.

Means is provided for rotating the housing 51 carrying the spokeassembly 62 for rotation about the stem 32 and consists of a ring gear66 secured to the top of the housing by cap screws 67. The ring gear isdriven by a spur gear 68 mounted on a shaft 69. The shaft 69 isrotatably mounted in a vacuum feed-through 71 provided in the top plate26. A pulley 72 is mounted on the upper end of the shaft 69 and isdriven by a belt 73. The belt 73 is driven by a pulley 74 mounted on theshaft 76 of an electric 77. The motor 77 is carried by a bracket 78mounted on theupper wall 13. It can be plate 86 by cap screws 91. Ballbearing assemblies 92 are mounted within the inner and outer bearingblocks 88 and 89. The bearing assembly 92 is retained within the bearingblock 88 by a retaining ring 93. The other bearing assembly 92 isretained in the bearing block 89 by retaining ring 94. An elongate shaft96 is mounted in the bearing assemblies 92 for rotation about thelongitudinaly axis of the shaft. The shaft 96, as shown in FIG. 3, issquare in cross-section for a purpose hereinafter described.

A planetary bevel gear 97 is secured to the end of the shaft 96extending through the bearing assembly 92 carried by the bearing block88. Suitable means such as a key (not shown) is provided so that whenthe planetary gear 97 is rotated, the shaft 96 is rotated therewith. Aretaining ring 98 is mounted on the shaft 96 for retaining the planetarygear 97 on the shaft 96. The planetary bevel gear 97 engages a largestationary sun gear 99 which is secured by cap screws 101 to thetransfer plate 39. It can be seen that when the spoke assembly 62 isrotated the bevel gear 97 is forced to rotate by the stationary sun gear99.

Each of the assemblies 79 include a drive gear 106 which is slidablymounted on the square shaft 96 of the spindle assembly. The drive gear106 is provided with a large hub 107 upon which there are mounted twoclosely spaced ball bearing assemblies 108. The drive gear 106 isprovided with gear teeth which are formed on two bevels 109 and 111which are at an exterior angle of approximately 148 with respect to eachother. The ball bearing assemblies 108 carrying the hub 107 are mountedin a bearing housing 112 and are retained therein by a retaining ring113. Since the ball bearing assemblies 108 are locked within the bearinghousing 112, the drive gear 106 will always be rotating along the axisof the shaft 96. The two bearing assemblies 108 prevent rocking of thedrive gear 106 on the shaft 96. It can be seen that the hub 107 of thedrive gear 106 rests against the inner race of the inner ball bearingassembly 108.

A spindle carrier assembly 114 is mounted on each of the housingassemblies 79 and is comprised of a pair of spaced parallel generallyL-shaped side plates 116 which are secured to the bearing housing 112 bycap screws 115. Each of the side plates 116 is provided with a cut-out117 extending vertically through the upper end thereof which accomodatesthe drive gear 106. A pair of spaced support bars or plates 118 aresecured to the side plates 116 by cap screws 121. A can be seen fromFIG. 3, the support bars 118 extend over spaced parallel rails or plates119 forming a part of the housing assembly 79 and are adapted to rideupon the top surfaces thereof for sliding movement longitudinally of therails. The rails 119 are mounted by cap screws 112 on the bearing blocks88 and 89.

Each of the rails 119 is provided with two spaced parallel rows ofthreaded holes 123 which are spaced apart in a direction extendinglongitudinally of the rails 119 a suitable distance as, for example, 2inches between holes. Four cap screws 124 are threaded into four of theholes 123 and are adapted'to be threaded into the threaded holesjl25provided in the side plate 116. Thus, as can be seen by removing thefour screws from each of the side plates, it is possible to shift theside plates longitudinally of the rails by 2 inch increments. The drivegear 106 will also slide along the square shaft 96 and will be driven bythe square shaft in any position to which the side plates 116 are moved.

A spindle assembly 126 is carried by the side plates 1 16 of eachspindle traverse adjustment housing assemblies 79 and consists of acylindrical housing 126 which has a shaft 128 rotatably mounted thereinby a pair of spaced bearing assemblies (not shown). As is well known tothose skilled in the art, substrate holders 129 are adapted to besecured to the shaft 128 so they are rotated with the shaft. Thesubstrates are adapted to be secured to the substrate holders. Thesubstrate holders can be of any conventional type as, for example,parabolic, circular and flat.

A bevel gear 131 is mounted on the other end of the shaft 128 and isadapted to engage the drive gear 106. The housing 126 is supported by aclamping body 132 consisting of two parts 133 and 134 which are fastenedtogether about the housing 126 by screws 136. A pair of spaced parallellegs or arms 137 are secured to the part 133 by suitable means such aswelding and extend upwardly at an angle which is substantially parallelto the axis of rotation of the shaft 128. Theupper extremities of thearms 137 are pivotally mounted between the side plates 116 and aresecured thereto by dowel pins 138 so as to permit swinging movement ofthe spindle assembly 126 with axis of swing movement being coincidentwith the point of contact of the gears 106 and 131.

Means is provided for locking the spindle assembly 126 in apredetermined angular position and consists of cap screws 141 which arethreaded into the part 133. The cap screws 141 extend through arcuateslots 142 provided in the side plates 116. The center of the arc is theaxis ofrotation provided by the dowel pins 138. Washers 143 are carriedby the cap screws 141 and are adapted to engage the side plates 116. Itcan be seen that by tightening the cap screws 141, the spindleassemblies 126 can be held in the desired angular position.

In order to facilitate pivotal movement of the spindle assemblies 126,an eye bolt 46 is provided which is seated in a groove 147 provided inthe part 133 of the clamping body 132. A roll pin 148 is mounted in ahole 149 provided in the body and extends through the eye bolt 146 toretain the eye bolt within the groove 147. The eye bolt 147 extendsthrough a hole 151 provided in a cross bar 152. The cross bar 152 issecured to the side plates 116 by suitable means such as welding. Awasher 153 is provided on the eye bolt and engages the cross bar 152 andis held in place by a nut 154. From the arrangement shown, it can beseen that the eye bolt 146 will carry most of the load of the spindleassembly 126 even when a relatively heavy substrate holder is mountedthereon. When it is desired to change the angle of the spindle assembly63, it is merely necessary to loosen the nut 154 and the cap screws 141to permit the spindle assembly to be moved toward the vertical.Conversely, when it is desired to move the spindle assembly further awayfrom the vertical, the nut 154 is tightened on the eye bolt to pull thespindle assembly toward the greater angle from the vertical. As soon asthis has been accomplished, the cap screws 141 can be tightened.

Operation of the coating machine having an adjustable double rotationsystem may now be briefly described as follows. Let it be assumed thatthe substrate holders 129 have been filled with substrate and that thechamber 19 has been evacuated to the desired degree and that it isdesired to begin a coating operation. The double rotation system isplaced in operation by energizing the motor 77 which causes rotation ofthe spur gear 68 and the spur gear 68 causes rotation of the ring gear66 which, in turn, causes rotation of the stem 32 and the plurality ofradially extending spider or spoke assemblies 62 which are carriedthereby. The carrying plates 86 rotate with the spoke assemblies andcarry the spindle assemblies 126. As this occurs, the planetary bevelgear 97 is caused to rotate by engagement with the stationary sun gear99. Rotation of the gear 97 causes rotation of the shaft 96. Rotation ofthe shaft 96 causes rotation of the bevel gear 106. Rotation of thebevel gear 106 causes rotation of the beveled crown gear 131. Thiscauses rotation of the spindle 128 and the substrate holder 129 carriedthereby. Thus, it can be seen that a double rotation system is providedin that the substrates carried by the substrate holders 129 arerotated'about an axis which is coincident with the axis of rotation forthe stem 32. In addition, they are rotated about an axis which iscoincident with the axis of the spindle 128.

An important feature of the present invention is that the distance fromthe centerline of the axis of rotation for the stem 32 and the spindleassemblies 126 can be adjusted. This can be accomplished by moving theside plates 116 and the bearing housing 112 secured theretolongitudinally of the rails l03 in a direction which is longitudinal ofthe axis. of the shaft 96. As explained previously, this is accomplishedby removing the four cap screws 124 from each of the side plates 116.When this is done, the side plates 116 and the spindle assembly 126 aresupported by the side plate 118. This ensures that it will not benecessary for the shaft 96 to support all the weight of the spindleassembly 126 and the substrate holders carried thereby. As soon as thecap screws 124 have been removed, the side plates and the spindleassembly 126 may be moved in increments along the axis of the shaft 96as determined by the positioning of the holes 103 and then secured ina-desired position by the cap screws 124. It can be seen that it ispossible to radially adjust the position of the spindle assembly 126within the chamber 19 as determined by the length of the shaft 96 andthe spacing between the bearing blocks 88 and 89. In all positions ofthe spindle assembly 126 double rotation of the substrates will still beprovided.

In addition with the present invention, it is possible to adjustthe-angle of the substrates with respect to the sources from which thematerials are being evaporated by tilting of the spindle shaft 128. Asexplained previously, this can be accomplished by loosening the capscrews 141 and then using the nut 154 to position the spindle assembly128 to the desired angle and then retightening the cap screws 141 tohold the spindle in this predetermined angular position. The crown spurgear 131 and the bevel gear 106 have been designed in such a manner thatthe spindle 128 will be positively driven through a substantialvariation in angle of the axis of the shaft 128. By way of example, anangle ranging from the vertical to 32 from the vertical can be readilyaccomplished with the mechanism hereinbefore described while stillobtaining a positive driving relationship between the bevel gear 106 andthe beveled crown gear 131. This is made possible because of the twobevels 109 and 111 provided on the gear 106.

By way of example, in one embodiment of the present invention, 12 inchesof travel is permitted for the bevel gear 106 longitudinally of theshaft 96 thus making it possible to change the center distance from thespindle 128 to the center of the sun gear 99 from 20 inches through 32inches.

From the adjustments hereinbefore described, it can be seen that theradius of rotation can be varied as well as the angle of rotation forthe substrates. Varying of the radius of rotation is advantageousbecause when coating certain types of substrates as, for example, smallsubstrates, it is possible to utilize different radiuses so that it ispossible to place a great many more spindle assemblies in the machine tothereby obtain a much greater capacity for the machine. The machine isalso advantageous in that it makes it possible to cover substrates whichheretofore have been difficult to coat satisfactorily. This can beaccomplished by changing the radius and also by tilting of the spindleaxis toward or away from the coating source to obtain the coatingdesired.

By way of example, if it is desired to coat three large substrates, theycan be placed apart. In such a case, a substrate as large as 37 inchescan be coated in i a coating machine of this type and size. If twelve ofthe spoke assemblies and spindle assemblies are placed within thecoating machine, then it is possible to coat 10 or 11 inch diametersubstrates and to almost completely fill the circle with substrates.

Any combination of spoke assemblies and spindle assemblies can beutilized, for example, combinations can be worked out utilizing 1Ospokes, five spokes, four spokes or even eight spokes. Substrate holdersof various sizes also can be utilized ranging from' 37 inches down to 10inches or less.

It is apparent from the foregoing that there has been provided a coatingmachine having an adjustable rotation system which has many advantageousfeatures. It

is constructed in such a way that the angle of the substrate holder withrespect to the source can be readily varied. In addition, the radius ofrotation about the sources also can be readily adjusted. The system isdesigned in such a manner that the desired amount of stability isretained. A positive drive is provided so that there is no undesirableslippage. The system is also designed in such a manner thatsubstantially the entire area which is covered by the coating streamsfrom the coating sources will be filled with substrate holders andsubstrates carried thereby to make possible maximum utilization of thespace within the vacuum chamber and also to obtain the desired coatingangle or angle of incidence for the vapor stream for the substratesbeing coated.

I claim:

1. In a coating machine having an adjustable double rotation system, avacuum chamber, at least one coating source disposed in the vacuumchamber, a plurality of spindle assemblies mounted in the chamber andeach having a rotatable spindle, a substrate holder carried by eachspindle and adapted to receive at least one substrate which can receivecoating material from the coating source, means for orbiting the spindleassemblies about the coating source, means for rotating the spindlesabout their own axes of rotation during the time that they are beingrotated about the source and means for adjusting the spacing of thespindle assemblies substantially along the radial extent toward and awayfrom the axis of rotation of the spindle assemblies about the source,said means for adjusting including a shaft extending radially of thechamber and drive means slidably mounted on said shaft and driving saidspindle and means in the chamber for driving said shaft.

2. A machine as in claim 1 together with means for adjusting the angleof the spindle with respect to the position of the coating source.

3. A machine as in claim 1 wherein said means for rotating the spindlesof the spindle assemblies about their own axes includes a bevel gearmounted on the spindle 6. A machine as in claim 5 wherein said meanswithin said chamber includes a planetary gear mounted on said shaft anda stationary sun gear having its axis coincident with the axis ofrotation for the spindle assemblies about the source and engaging thegear mounted on the shaft.

7. A machine as in claim 5 together with a stem mounted in said chamber,a housing rotatably mounted on said stem, means carried by said housingfor supporting said shafts in a generally horizontal position and meansfor rotating said housing.

8. In a coating chamber having an adjustable double rotation system, avacuum chamber, at least one coating source disposed in the vacuumchamber, a stem mounted in the vacuum. chamber, a housing rotatablymounted on the stem, a plurality of radially extending spoke assembliesmounted on said housing, bearing means carried by said spoke assemblies,a generally horizontal shaft mounted in each of the bearing assemblies,a planetary gear carried by the shaft, a stationary sun gear disposedwithin the chamber and engaging the planetary gear, means for causingrotation of said housing about said stem and to cause rotation of saidspoke assemblies and the shafts carried thereby about the axis of saidstem so that said shaft is rotated about its axis, a drive memberslidably mounted on said shaft, spindle carrier means associated withsaid drive member and -movable longitudinally of the shaft with saiddrive member, a spindle assembly, means mounting said spindle assemblyon said spindle carrier, said spindle assembly including a spindlerotatably'mounted therein and driven means adapted to engage the drivemember and engaging the spindle for causing rotation of the spindle asthe drive member is rotated upon rotation of said shaft, said spindlebeing adapted to carry a substrate holder for carrying'substrates whichare to be coated with material emanating from the coating source.

9. A machine as in claim 8 together with means for retaining saidspindle carrier means in predetermined positions extendinglongitudinally of the shaft.

10. A machine as in claim 9 together with means for pivotally mountingsaid spindle assembly on said spindle carrier means whereby the angle ofthe spindle with respect to the source can be adjusted.

and bevel gear means for driving the bevel gear on the 11. A machine asin claim 10 wherein the angle can be varied from vertical to 32 from thevertical.

12. A machine as in claim 8 wherein said drive member is in the form ofabevel gear having teeth with abutting circumferential surfaces inclinedat an angle with respect to each other.

13. A machine as in claim 10 wherein said means for adjusting the angleof the spindle assembly includes a member secured to the spindle carriermeans to hold the spindle assembly in the desired angular position.

14. A machine as in claim 13 together with additional means for lockingsaid spindle assembly in the desired angular position.

1. In a coating machine having an adjustable double rotation system, avacuum chamber, at least one coating source disposed in the vacuumchamber, a plurality of spindle assemblies mounted in the chamber andeach having a rotatable spindle, a substrate holder carried by eachspindle and adapted to receive at least one substrate which can receivecoating material from the coating source, means for orbiting the spindleassemblies about the coating source, means for rotating the spindlesabout their own axes of rotation during the time that they are beingrotated about the source and means for adjusting the spacing of thespindle assemblies sUbstantially along the radial extent toward and awayfrom the axis of rotation of the spindle assemblies about the source,said means for adjusting including a shaft extending radially of thechamber and drive means slidably mounted on said shaft and driving saidspindle and means in the chamber for driving said shaft.
 2. A machine asin claim 1 together with means for adjusting the angle of the spindlewith respect to the position of the coating source.
 3. A machine as inclaim 1 wherein said means for rotating the spindles of the spindleassemblies about their own axes includes a bevel gear mounted on thespindle and bevel gear means for driving the bevel gear on the spindle.4. A machine as in claim 3 wherein said bevel gear means includes bevelgears having abutting circumferential surfaces which are inclined atangles with respect to each other.
 5. A machine as in claim 1 whereinsaid drive means includes gearing means.
 6. A machine as in claim 5wherein said means within said chamber includes a planetary gear mountedon said shaft and a stationary sun gear having its axis coincident withthe axis of rotation for the spindle assemblies about the source andengaging the gear mounted on the shaft.
 7. A machine as in claim 5together with a stem mounted in said chamber, a housing rotatablymounted on said stem, means carried by said housing for supporting saidshafts in a generally horizontal position and means for rotating saidhousing.
 8. In a coating chamber having an adjustable double rotationsystem, a vacuum chamber, at least one coating source disposed in thevacuum chamber, a stem mounted in the vacuum chamber, a housingrotatably mounted on the stem, a plurality of radially extending spokeassemblies mounted on said housing, bearing means carried by said spokeassemblies, a generally horizontal shaft mounted in each of the bearingassemblies, a planetary gear carried by the shaft, a stationary sun geardisposed within the chamber and engaging the planetary gear, means forcausing rotation of said housing about said stem and to cause rotationof said spoke assemblies and the shafts carried thereby about the axisof said stem so that said shaft is rotated about its axis, a drivemember slidably mounted on said shaft, spindle carrier means associatedwith said drive member and movable longitudinally of the shaft with saiddrive member, a spindle assembly, means mounting said spindle assemblyon said spindle carrier, said spindle assembly including a spindlerotatably mounted therein and driven means adapted to engage the drivemember and engaging the spindle for causing rotation of the spindle asthe drive member is rotated upon rotation of said shaft, said spindlebeing adapted to carry a substrate holder for carrying substrates whichare to be coated with material emanating from the coating source.
 9. Amachine as in claim 8 together with means for retaining said spindlecarrier means in predetermined positions extending longitudinally of theshaft.
 10. A machine as in claim 9 together with means for pivotallymounting said spindle assembly on said spindle carrier means whereby theangle of the spindle with respect to the source can be adjusted.
 11. Amachine as in claim 10 wherein the angle can be varied from vertical to32* from the vertical.
 12. A machine as in claim 8 wherein said drivemember is in the form of a bevel gear having teeth with abuttingcircumferential surfaces inclined at an angle with respect to eachother.
 13. A machine as in claim 10 wherein said means for adjusting theangle of the spindle assembly includes a member secured to the spindlecarrier means to hold the spindle assembly in the desired angularposition.
 14. A machine as in claim 13 together with additional meansfor locking said spindle assembly in the desired angular position.